EXHIBITORS
Confovis We, Confovis GmbH based in Jena (Germany), are a developer and manufacturer of instruments for automated optical inspection (WAFERinspect AOI) and optical 3D surface metrology (TOOLinspect) for the semiconductor industry. Our devices enable precise defect inspection, classification and dimensional measurements, for example for surface topography in statistical process control. Unlike other AOI systems, our solutions are versatile due to their unique hardware. Adjustments in defect inspection recipes, as well as classifications can be made directly via the Graphical User Interface (GUI). Hence, the defect classes are taught by short GUI-supported learning, using rule-based artificial intelligence.
JX JX Advanced Metals provides high quality sputtering targets for semiconductor devices, flat panel displays, magnetic devices, photovoltaic cells and various other applications. Through years of research, development, and production activities, we have developed technologies in areas such as high-purity, low-inclusion casting, powder metallurgy, and structure control, that are essential for demanding thin-film metal deposition processes. In addition to our broad range of sputtering targets, we offer compound semiconductor materials for telecom and data communications, as well as high purity metals for epi-growth processes. For more information on our leading-edge electronic materials, please visit our online showroom at https://nmmjx-dc.com/en/.
lesker Kurt J. Lesker Company is the leading global provider of exceptional customer service and high-quality vacuum equipment, with a goal of enabling the innovation, creation, and advancement of a vast array of products. Specifically within the fields of LEDs, Optics, UHV/Synchrotrons, Electronics, Wear and Decorative Coatings, R&D, and other vacuum solutions.
scia Systems GmbH Founded in 2013, scia Systems is a technology leader in thin-film process equipment based on advanced ion beam and plasma technologies. The systems are used for coating, etching, and cleaning processes with nanometer resolution and have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries.
Due to their modular design, the systems are suitable for high-volume industrial production and R&D environments, for example, in a cluster configuration.
Polyteknik Polyteknik AS is a PVD equipment manufacturer with an innovative and best service approach. With more than 30 years in business, a global reference list, and an excellent platform of technology, Polyteknik AS has turned to be an appreciated partner in the thin film industry.
Here we strive to meet our customers’ needs and demands through highly qualified personnel – and make positive agreements. Delivering exceptional products and providing quality services with end-to-end support is at the core of our company. The ambition is to be a reliable partner in all aspects of co-operations.
Our portfolio of platform systems ranges from small-scale R&D to high-volume or large-area deposition systems. Our main focus is on cluster systems for the semiconductor industry, based on the Flextura platform for all wafer sizes (2"–12").
Polyteknik AS covers several deposition processes, including sputtering and evaporation. We would be interested in discussing applications such as:
- High-quality c-axis oriented AlN
- Glancing angle deposition
- Magnetron sputtering epitaxy
- Deposition at temperatures of up to 1000 °C
- Proven metal oxide and nitride sputtering
- Advanced magnetic materials
- Low stress/damage sputtering
At Polyteknik AS, you will meet a dedicated team interested in strong cooperation to find the best solution. We offer standard systems, as well as systems developed in partnership with customers for specific purposes.
Sitemap  
© 2026 Phantoms Foundation